Closure Device for Evaporator Cell of a Coating System
Sensoren, Geräte und Komponenten
We offer a new technology to avoid the contaminations and to reduce the associated cleaning and maintenance work. Fig. 1 shows a conventional closure device with a cover plate that can be moved to open or to close the evaporator cell.
This layout shares several disadvantages mentioned above. We propose to exchange this closure device by our closure device that is shown in the Fig. 2.
We designed an additional collecting chamber that is connected to the evaporator cell while the cover plate is placed in the closed position. This setup collects source material not directed at the sample both in the open and the closed position. During maintenance, the entire unit can be removed and replaced through the shutter port, thereby removing the collected source material, without having to open other ports of the deposition chamber.
In addition, because of the larger distance of the inner closure device walls from the source and the small open solid angle in the open position, thermal gradients (‘shutter transients’) are efficiently reduced and, since the material at the inner closure device walls is further away from the cell orifice and remains colder, reemission into the cell is minimized.
- Reduced contamination of the vacuum chamber
- Reduced contamination of the cell and its immediate surroundings
- Possibility to collect the contaminants
- Simple design and handling
- Easy cleaning and maintenance
DE patent application filed in April 2011.
- Ref.-No.: 1201-5136-BC (380,0 KiB)
Dr. Bernd Ctortecka, M. Phil.
Senior Patent- & Lizenzmanager
Telefon: 089 / 29 09 19-20